Chapter 1 Semiconductors Physics
1.1 Energy Bands and Carrier Concentration
1.2 Carrier Transport Phenomena
1.3 PN Junction
1.4 Summary
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Chapter 2 Semiconductor Device
2.1 Bipolar Junction Transistor
2.2 The MOSFET
2.3 Microwave and Photonie Devices
2.4 Summary
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Chapter 3 Processing Tedmology
3.1 Crystal Growth and Epitaxy
3.2 Crystal Growth from the Melt
3.3 Vaper-Phase Epitaxy
3.4 Oxidation and Film Deposition
3.5 Diffusion and Ion Implantation
3.6 Lithographies
3.7 Wet Chemical Etching
3.8 Dry Etching
3.9 Integrated Devices
3.10 Fundamental Limits of Integrated Devices
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Chapter 4 Integrated Circuits
4.1 Introduction
4.2 Design Analysis and Simulation
4.3 Verification
4.4 Sunmaary
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Chapter 5 Microelectromechanical Systems (MEMS)
5.1 Introduction
5.2 MEMS
5.3 Mechanical Characteristics of Silicon
5.4 Micmfabrications for MEMS
5.5 Micmsensing for MEMS
5.6 Electmmechanical Actuation
5.7 Materials for MEMS
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Chapter 6 Examples of Scientific and Technological Papers
6.1 The Challenges for Physical Limitations in Si Microelectrc
6.2 Microelectronics and Photonlcs - the Future
6.3 Accelerated Verification of Digital Devices Using VHDL
6.4 What Is Nanoteehnology
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