Chapter 1 Introduction
1.1 Concept
1.2 Basic conception of flexure hinge
1.3 Research lever and status
1.4 Research method, step and contribution
1.5 Study contents and objectives
Chapter 2 Compliant mechanism design
2.1 Design case one: a 2-DOF micro-gripper
2.2 Design case two: a compactness micro-gripper
2.3 Design case three: a dual-axis micro-gripper
2.4 Design case four: 2-DOF precision positioning platform
2.5 Design case five : 3-DOF micro/nano position platform
2.6 Summary
Chapter 3 Research of modeling method
3.1 Analysis case one:2-DOF micro-gripper mechanism
3.2 Analysis case two : a compactness micro-gripper
3.3 Analysis case three: dual-axis micro-gripper
3.4 Analysis case four: 2-DOF micro/nano position stage
3.5 Analysis case five: 3-DOF micro/nano position stage
3.6 Summary
Chapter 4 Optimization and simulation of finite element analysis
4.1 Optimization case one: 2-DOF micro-gripper mechanism
4.2 Optimization case two: a compactness micro-gripper
4.3 Optimization case three: dual-axis micro-gripper
4.4 Optimization case four: 2-DOF micro/nano position stage
4.5 Optimization case five: 3-DOF micro/nano position stage
4.6 Summary
Chapter 5 Study of hysteresis model and compensation control method
5.1 Hysteresis compensation method one
5.2 Hysteresis compensation method two
5.3 Summary
Chapter 6 Study of motion control method
6.1 Study case one: adaptive backstepping slide mode control method for compactness micro-gripper
6.2 Study case two: position/force control for dual-axis micro-gripper
6.3 Study case three: robust control design
6.4 Study case four: backstepping dynamic surface control method
6.5 Summary
Chapter 7 Conclusions and perspectives
7.1 Conclusions
7.2 Perspective for future works
References
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